2017•Analytica Chimica ActaRequires access

A fast and low-cost microfabrication approach for six types of thermoplastic substrates with reduced feature size and minimized bulges using sacrificial layer assisted laser engraving

Longjun Gu, Guodong Yu, Cheuk‐Wing Li

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Key concepts: Polydimethylsiloxane, Microfabrication, Engraving, PDMS stamp, Polystyrene, Photoresist, Fabrication, Laser

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A fast and low-cost microfabrication approach for six types of thermoplastic substrates with reduced feature size and minimized bulges using sacrificial layer assisted laser engraving — Research Paper | ScholarLens