2017•2017 International Conference on Green Energy Conversion Systems (GECS)Requires access
Fabrication of micro and nano cantilevers review
Amal Jamal Boukar, Mohamed Abdussalam Shawesh
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Abstract
In this review a detailed analysis of cantilever has been carried out, cantilevers are not more than a beam. Cantilevers are of various types; this classification is based on the connection of its both ends if it is connected from its one end while the other end is free to move then this type of cantilever is named as fixed-free cantilever. On the other hand if both ends are fixed then it is called fixed-fixed type of cantilevers. Numerous high resonant modes of cantilevers and its application in the field of science have been analyzed. An introduction to quantum dot concept and its incorporation to the cantilever have been shown and various applications of this technique are analyzed. A detailed overview of the fabrication process of the cantilever is discussed in this report. Fabrication of the micro and nano cantilevers has been discussed. The introduction to the quality factor of a cantilever is discussed to analyze the performance of a particular cantilever, a formula of quality factor has been shown and the effect of quality factor on the efficiency and rate of energy dissipation in a cantilever is analyzed.