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1989•MRS ProceedingsRequires access

Pt/Ti Low Resistance Non-Alloyed Ohmic Contacts to InP-Based Photonic Devices

Avishay Katz, S. N. G. Chu, P. M. Thomas, William C. Dautremont-Smith

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Key concepts: Materials science, Ohmic contact, Contact resistance, Composite material, Adhesion, Layer (electronics), Doping, Metal

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