2015•Bulletin of the American Physical SocietyRequires access

Modeling of the Reactive High Power Impulse Magnetron Sputtering (HiPIMS) process

Jón Tómas Guðmundsson, Daniel Lundin, Michael A. Raadu, N. Brenning, Tiberiu M Minea

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Key concepts: High-power impulse magnetron sputtering, Impulse (physics), Materials science, Sputter deposition, Sputtering, Physics, Nanotechnology, Thin film

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Modeling of the Reactive High Power Impulse Magnetron Sputtering (HiPIMS) process — Research Paper | ScholarLens