814 Knoop Hardness Testing for Amorphous Thin Film and Estimation of Deformation Region around the Indentaion using Nanoindentation Test

An inelastic characteristic of film of an amorphous alloy is studied by using nanoindentation test. First, the hardness is evaluated as a function of applied load to obtain an optimal indentation load and the interaction between different indenters is investigated to obtain a optimal indentation spacing. Then, we performed the nanoindentation test around the damaged region introduced by a Knoop indentation test. As a result, the hardness is almost the same as the virgin material and its distribution is spatially uniform. This result implies that the characteristic length scale of the deformation region is extremely smaller than the resolution of the nanoindentation test.