2004•The Proceedings of the Conference on Information Intelligence and Precision Equipment IIPOpen access
Development of Double-Layered Composite PZT Thin Films
Katsuji Nagasawa, Norio TAGAWA, Atsunobu MORI
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Abstract
This paper describes the development of novel PZT thin films. The feature for novel PZT thin films is that double-layered composite PZT thin films which laminate sputtered PZT thin films and sol-gel PZT thin films. The novel PZT thin films are found to have the higher (111) preferred orientation than not only sol-gel PZT thin films but also sputtered PZT thin films. In addition, it is found that composite PZT thin films, which feature is that the sol-gel derived PZT thin films are deposited on the sputtered PZT thin films, shows better characteristics.
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