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2008•2008 Solid-State, Actuators, and Microsystems Workshop Technical DigestOpen access

MEMS AND METAMATERIALS: A PERFECT MARRIAGE AT TERAHERTZ FREQUENCIES

Hu Tao, Chris M. Bingham, Andrew C. Strikwerda, Kebin Fan, Willie J. Padilla, Richard D. Averitt, X. Zhang

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Abstract

This paper reports our recent progress on creating active structures and devices to enhance the ability to manipulate and detect far-infrared, or terahertz (THz), radiation by combining electromagnetic metamaterials with MEMS technologies.We have designed, simulated, and fabricated state-of-the-art THz components which include a THz resonance switch, flexible THz metamaterials, and 3D THz metamaterials.Preliminary results demonstrate the potential of MEMS-enhanced metamaterials for THz applications.

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What this paper is about

This paper reports our recent progress on creating active structures and devices to enhance the ability to manipulate and detect far-infrared, or terahertz (THz), radiation by combining electromagnetic metamaterials with MEMS technologies.We have designed, simulated, and fabricated state-of-the-art THz components which include a THz resonance switch, flexible THz metamaterials, and 3D THz metamaterials.Preliminary results demonstrate the potential of MEMS-enhanced metamaterials for THz applications.

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Available abstract

This paper reports our recent progress on creating active structures and devices to enhance the ability to manipulate and detect far-infrared, or terahertz (THz), radiation by combining electromagnetic metamaterials with MEMS technologies.We have designed, simulated, and fabricated state-of-the-art THz components which include a THz resonance switch, flexible THz metamaterials, and 3D THz metamaterials.Preliminary results demonstrate the potential of MEMS-enhanced metamaterials for THz applications.

Key concepts: Terahertz radiation, Metamaterial, Microelectromechanical systems, Terahertz metamaterials, Split-ring resonator, Optoelectronics, Metamaterial absorber, Infrared

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