Akash Kannegulla, Li‐Jing Cheng
Abstract
We report an MAFIB technique that significantly improves the fidelity of nanofabrication that allows direct milling of nanostructures on various materials with fine edges and smooth surfaces. The technique supports precise fabrication of nanophotonic devices.
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We report an MAFIB technique that significantly improves the fidelity of nanofabrication that allows direct milling of nanostructures on various materials with fine edges and smooth surfaces. The technique supports precise fabrication of nanophotonic devices.
Key concepts: Nanolithography, Nanophotonics, Fabrication, Etching (microfabrication), Materials science, Nanotechnology, Nanostructure, Focused ion beam