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2015•The Japan Society of Applied PhysicsRequires access

An Evaluation on A Sub-1G-to-20G Integrated MEMS Accelerometer

Daisuke Yamane

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Key concepts: Accelerometer, Microelectromechanical systems, Materials science, Nanotechnology, Optoelectronics, Computer science, Operating system

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An Evaluation on A Sub-1G-to-20G Integrated MEMS Accelerometer — Research Paper | ScholarLens