A study of coFeB magnetic yoke based on planar electromagnet

This paper studies the fabrication of a novel planar electromagnet consisting of a planar copper coil and a magnetic yoke. CoFeB was used as the magnetic yoke material instead of the traditional permanent magnets. The planar electromagnet was fabricated and optimized to maximize the electromagnetic force, especially with varying CoFeB thickness. The micro-planar electromagnet was fabricated successfully by the traditional micro-electro-mechanical-system (MEMS) techniques and XRD, VSM were used to characterize the performance of the electromagnet. The planar electromagnet exhibits superior perpendicular magnetic anisotropy (PMA) and 0.006 emu of [Formula: see text] was achieved following 2 min deposition of CoFeB thin film. By integrating with other micro apparatuses, it is anticipated that the planar electromagnet will have potential applications in areas such as biosensors, biological medicine, drug delivery, chemical analysis and environmental monitoring.