The influence of internal factors on the parameters of MEMS resonators

This paper focuses on two approaches for designing of resonator of MEMS sensors. The first approach is the calculating of the quality factor and fundamental frequency of four types of resonators, which result from thermoelastic damping. And the second approach is the computing of the frequency changes of these four resonators, which are due to residual stress. In this article, the fourth type of the resonator reduces energy dissipation due to thermoelastic damping and sustains the frequency change due to residual stress. These two solving internal factors are useful for predicting of design steps of the resonator. We used COMSOL Multiphysics software to calculate these two factors.