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CIM automation in a semiconductor industry - The virtual factory system

Sim, See Hwa.

Abstract

This thesis describes the implementation of computer integrated manufacturing (CIM) automation in a Semiconductor Assembly and Test facility. The focus is on the enterprise vision of a Virtual Factory System (VFS) namely factory wide equipment SEMI Equipment Communication Standard/Generic Equipment Model (SECS/GEM) system connectivity and factory wide Automated Material Handling System (AMHS) implementation. (Professor Sivakumar)

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Available abstract

Key concepts: Factory (object-oriented programming), Automation, Manufacturing engineering, Semiconductor industry, Engineering, Systems engineering, Computer science, Mechanical engineering