Hamid T. Chorsi, Meysam T. Chorsi, Stephen D. Gedney
Abstract
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Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an analytical method.
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Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an analytical method.
Key concepts: Microelectromechanical systems, Resonator, Numerical modeling, Computer science, Materials science, Mechanical engineering, Engineering, Physics