Jairo Plaza-Castillo, Abel García-Barrientos, Miriam Moreno‐Moreno, M. Josefina Arellano-Jiménez, K. Y. Vizcaíno, J. L. Bernal
Abstract
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J Plaza-Castillo, A García-Barrientos, M Moreno-Moreno, M J Arellano-Jiménez, K Y Vizcaíno, JL Bernal; Analysis of H 2 and SiH 4 in the Deposition of pm-Si
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J Plaza-Castillo, A García-Barrientos, M Moreno-Moreno, M J Arellano-Jiménez, K Y Vizcaíno, JL Bernal; Analysis of H 2 and SiH 4 in the Deposition of pm-Si
Key concepts: Plasma-enhanced chemical vapor deposition, Materials science, Solar cell, Deposition (geology), Thin film solar cell, Process (computing), Thin film, Optoelectronics