К ВОПРОСУ СНИЖЕНИЯ ГАЗОВЫДЕЛЕНИЯ ИЗ КЛЕЕВЫХ СОЕДИНЕНИЙ В ВАКУУМНЫХ ЭЛЕКТРОННО-МЕХАНИЧЕСКИХ ПРИБОРАХ

The outgassing from the adhesive joints, the use of which will significantly simplify the assembly of the vacuum electro-mechanical devices, has a negative impact on the operation of these devices, reducing their lifespan. The article solves the problem of reducing the rate of outgassing from the adhesive joints in vacuum electro-mechanical devices due to thermal processing (drying), which is widely used in industry. For 14 industrial adhesives (E505, P102, E207, H74UNF, H77S, 353ND, Resbond 940LE, Resbond 989F, Cerambond 618N, WB-21, Anyterm 106, C, OS-52, OS-92), suitable for assembly electro-mechanical devices, the paper defines qualitative and quantitative composition of the atmosphere of the residual gas generated inside electro-mechanical devices due to outgassing from the adhesive joints that enables us to pick the gas absorption elements and their mode of operation to maintain the vacuum. In order to improve the reliability of the study results, the research was carried out by two methods: mass spectrum (mass spectrometer «MI-1311»), and opto-acoustic (gas analyzer «Megacon 10K»). The paper estimates maximum speed of outgassing for precise vacuum electro-mechanical device with a lifetime of 15 years. There is the developed model of the kinetics of outgassing  to determine the modes of thermal processing process adhesives, namely, temperature, duration and atmosphere (vacuum or air), providing the necessary speed outgassing from the adhesive joints for normal operation of the vacuum electro-mechanical devices. Based on the experimentally derived values of the velocities of the outgassing components of the residual gas for the two modes of thermal processing  adhesives are calculated outgassing speed for other modes and selected the optimal parameters of  thermal processing.