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2016•Surface and Interface AnalysisRequires access

Analysis of surface roughness correlation function by X‐ray reflectivity

Yoshikazu Fujii

Open publisher page 6 citations

Abstract

X‐ray reflectivity (XRR) is a powerful tool for the analysis on surface and interface roughness. In the conventional XRR analysis, the reflectivity was calculated based on the Parratt formalism, accounting for the effect of roughness by the theory of Nevot–Croce. We have developed an improved XRR formalism which derives more accurate surface and interface roughness. In this study, we introduced the effective roughness depending on the incidence angle of X‐rays. The newly developed XRR formalism, which derives more accurate surface and interface roughness, is found to be dependent on the size of coherent X‐rays probing area, and further derives the roughness correlation function as well as the lateral correlation length. Copyright © 2016 John Wiley & Sons, Ltd.

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What this paper is about

X‐ray reflectivity (XRR) is a powerful tool for the analysis on surface and interface roughness. In the conventional XRR analysis, the reflectivity was calculated based on the Parratt formalism, accounting for the effect of roughness by the theory of Nevot–Croce. We have developed an improved XRR formalism which derives more accurate surface and interface roughness. In this study, we introduced the effective roughness depending on the incidence angle of X‐rays. The newly developed XRR formalism, which derives more accurate surface and interface roughness, is found to be dependent on the size of coherent X‐rays probing area, and further derives the roughness correlation function as well as the lateral correlation length. Copyright © 2016 John Wiley & Sons, Ltd.

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Available abstract

X‐ray reflectivity (XRR) is a powerful tool for the analysis on surface and interface roughness. In the conventional XRR analysis, the reflectivity was calculated based on the Parratt formalism, accounting for the effect of roughness by the theory of Nevot–Croce. We have developed an improved XRR formalism which derives more accurate surface and interface roughness. In this study, we introduced the effective roughness depending on the incidence angle of X‐rays. The newly developed XRR formalism, which derives more accurate surface and interface roughness, is found to be dependent on the size of coherent X‐rays probing area, and further derives the roughness correlation function as well as the lateral correlation length. Copyright © 2016 John Wiley & Sons, Ltd.

Key concepts: X-ray reflectivity, Surface finish, Formalism (music), Surface roughness, Reflectivity, Optics, Materials science, Physics

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