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2011•Unpublished venueRequires access

A modular system of Deep Level Transient Spectroscopy

Nazreen Rusli, Didier Debuf

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Abstract

Deep Level Transient Spectroscopy (DLTS) is a technique to determine the electrical characteristics of an electrically active defect in a semiconductor. A measurement system is developed to detect defects in a semiconductor in a LabView environment. A more accurate method namely Fundamental Frequency Deep Level Transient Spectroscopy (FFDLTS) is proposed as one of the methods to analyze the defect level depth.

About this research paper

What this paper is about

Deep Level Transient Spectroscopy (DLTS) is a technique to determine the electrical characteristics of an electrically active defect in a semiconductor. A measurement system is developed to detect defects in a semiconductor in a LabView environment. A more accurate method namely Fundamental Frequency Deep Level Transient Spectroscopy (FFDLTS) is proposed as one of the methods to analyze the defect level depth.

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Available abstract

Deep Level Transient Spectroscopy (DLTS) is a technique to determine the electrical characteristics of an electrically active defect in a semiconductor. A measurement system is developed to detect defects in a semiconductor in a LabView environment. A more accurate method namely Fundamental Frequency Deep Level Transient Spectroscopy (FFDLTS) is proposed as one of the methods to analyze the defect level depth.

Key concepts: Deep-level transient spectroscopy, Transient (computer programming), Semiconductor, Spectroscopy, Modular design, Materials science, Optoelectronics, Semiconductor device

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