2016•Applied Surface ScienceRequires access

Model selection in spectroscopic ellipsometry data analysis: Combining an information criteria approach with screening sensitivity analysis

Dmitriy Likhachev

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Key concepts: Akaike information criterion, Model selection, Bayesian information criterion, Sensitivity (control systems), Parametric statistics, Selection (genetic algorithm), Computer science, Data mining

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Model selection in spectroscopic ellipsometry data analysis: Combining an information criteria approach with screening sensitivity analysis — Research Paper | ScholarLens