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2016•Unpublished venueRequires access

Fabrication of spiral zone plate using hybrid electron beam and x-ray lithography

Nan Gao, Xiaoli Zhu, Hailiang Li, Yilei Hua, Lina Shi, Changqing Xie

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Abstract

We report the fabrication of x-ray spiral zone plates (SZPs). Gold patterns were first fabricated on suspended membrane employing electron beam lithography, and then used as a mask to obtain the SZPs by x-ray lithography.

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What this paper is about

We report the fabrication of x-ray spiral zone plates (SZPs). Gold patterns were first fabricated on suspended membrane employing electron beam lithography, and then used as a mask to obtain the SZPs by x-ray lithography.

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Available abstract

We report the fabrication of x-ray spiral zone plates (SZPs). Gold patterns were first fabricated on suspended membrane employing electron beam lithography, and then used as a mask to obtain the SZPs by x-ray lithography.

Key concepts: X-ray lithography, Electron-beam lithography, Lithography, Fabrication, Stencil lithography, Materials science, Spiral (railway), Next-generation lithography

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