2014•Computers & Operations ResearchRequires access

Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach

Gian Antonio Susto, Simone Pampuri, Andrea Schirru, Alessandro Beghi, Giuseppe De Nicolao

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Key concepts: Metrology, Semiconductor device fabrication, Computer science, Dimensional metrology, Wafer, Context (archaeology), Process (computing), Reliability engineering

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Multi-step virtual metrology for semiconductor manufacturing: A multilevel and regularization methods-based approach — Research Paper | ScholarLens