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Batch Fabrication of Silicon Micropumps

Martin Richter, J. Kruckow, J. Weidhaas, M. Wackerle, Andreas Drost, Ulrich Schaber, Marina Schwan, K. Kühl

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Key concepts: Wafer, Die preparation, Wafer backgrinding, Materials science, Wafer testing, Wafer bonding, Fabrication, Stack (abstract data type)

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