Detection of Extreme UV and Soft X-Rays with Microchannel Plates: A Review
Oswald H. W. Siegmund, Roger F. Malina
Abstract
Oswald H. W. Siegmund, Roger F. Malina
Abstract
Microchannel plates are becoming widely used in spectroscopy and two dimensional imaging at EUV (100 - 1000 Å) and soft X-ray wavelengths (10 - 100 Å) for astronomy and microscopy. Although bare microchannel plates have low sensitivity (5% - 10% quantum detection efficiency) in this spectral region, use of photocathodes can increase substantially (to 30%-40%) microchannel plate performance. This, combined with the high spatial resolution (<50μm), fast time response (<300 ps), and large effective area (up to 100 mm diameter) achievable with microchannel plates make the latter a very attractive and versatile tool. We discuss the properties of microchannel plates, photocathode materials, and various microchannel plate detector readout schemes that have been used for soft X-ray and EUV detection.
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Microchannel plates are becoming widely used in spectroscopy and two dimensional imaging at EUV (100 - 1000 Å) and soft X-ray wavelengths (10 - 100 Å) for astronomy and microscopy. Although bare microchannel plates have low sensitivity (5% - 10% quantum detection efficiency) in this spectral region, use of photocathodes can increase substantially (to 30%-40%) microchannel plate performance. This, combined with the high spatial resolution (<50μm), fast time response (<300 ps), and large effective area (up to 100 mm diameter) achievable with microchannel plates make the latter a very attractive and versatile tool. We discuss the properties of microchannel plates, photocathode materials, and various microchannel plate detector readout schemes that have been used for soft X-ray and EUV detection.
Key concepts: Microchannel plate detector, Microchannel, Extreme ultraviolet lithography, Photocathode, Optics, Detector, Materials science, Extreme ultraviolet