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2003•2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)Requires access

Computer simulation of ion implantation at grazing ion-surface interactions

A.A. Dzhurakhalov, Farid F. Umarov

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Key concepts: Ion, Ion implantation, Computer science, Surface (topology), Grazing, Materials science, Chemistry, Mathematics

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