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1989•Acta Optica SinicaRequires access

A study of reflectivity-measurement in far ultraviolet and vacuum ultraviolet

Dakui Zhuang

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Abstract

A new method for measuring reflectivity in the spectum of far ultraviolet and vacuum ultraviolet is described in this paper. The instrument designed features an optical system, a look-in amplifying detection technique in connexion with a data processing computer. The accuracy is better than ±5×10-3 and the precision better than ±5×10-4.

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What this paper is about

A new method for measuring reflectivity in the spectum of far ultraviolet and vacuum ultraviolet is described in this paper. The instrument designed features an optical system, a look-in amplifying detection technique in connexion with a data processing computer. The accuracy is better than ±5×10-3 and the precision better than ±5×10-4.

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Available abstract

A new method for measuring reflectivity in the spectum of far ultraviolet and vacuum ultraviolet is described in this paper. The instrument designed features an optical system, a look-in amplifying detection technique in connexion with a data processing computer. The accuracy is better than ±5×10-3 and the precision better than ±5×10-4.

Key concepts: Ultraviolet, Vacuum ultraviolet, Reflectivity, Far ultraviolet, Optics, Optoelectronics, Materials science, Computer science

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