Removing function of polishing pad in computer controlled optical polishing

The base concept for computer controlled optical polishing (CCOP) is the deciding of material removing function of the subaperture polishing pad. Kinematic principles are applied to deduce the removing function of the polishing pad in conditions of planet motion and translation according to the Preston assumption and the respective performance curves are given to compare by computer simulation. Accoring to the analysis results, both of the two curves tend to Gauss curve in different degree, so planet motion and translation can be applied in CCOP to converge the figure error.