Research progress in the treatment of silicon tetrachloride waste

This review starts with a brief introduction of the background and status of polysilicon production,followed by the plight in polisilicon industry and the general treatment method of silicon tetrachloride.The composition of silicon tetrachloride waste and difficulties in treatment are discussed.Methods for the treatment of silicon tetrachloride waste in polysilicon production,including hydrolysis,filter,drying,combustion etc,are introduced.Comprehensive classification and discussion of all the methods are conducted.The future application is also discussed.