High Performance Infrared Antireflection Filmson ZnS Substrate for 8～12μm

In order to enhance the transmissivity of ZnS and mechanical feature of the antireflective film,the design and preparation of the high performance infrared wide-band antireflective film deposited on ZnS substrate are investigated.The selection of film materials,the optimization of deposition system and the process of the ion beam assisted deposition for the film systems are introduced.The infrared AR coating with good adhesion,stable optical performance are got.Finally,preparation serious environmental experiments,all targets were met design requirements.