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Optimal Design of the Parameters Piezoelectric Driver

Xu Wei

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Abstract

According to the theoretical design of piezoelectric effect piezoelectric drive. Drive beam width, length and the piezoelectric material and non-piezoelectric material thickness ratio of the output of the drive have a great impact on displacement. The use of MEMS professional finite element analysis software conventor ware,piezoelectric drive of the parameters for analysis and optimization of the structure.

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What this paper is about

According to the theoretical design of piezoelectric effect piezoelectric drive. Drive beam width, length and the piezoelectric material and non-piezoelectric material thickness ratio of the output of the drive have a great impact on displacement. The use of MEMS professional finite element analysis software conventor ware,piezoelectric drive of the parameters for analysis and optimization of the structure.

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Available abstract

According to the theoretical design of piezoelectric effect piezoelectric drive. Drive beam width, length and the piezoelectric material and non-piezoelectric material thickness ratio of the output of the drive have a great impact on displacement. The use of MEMS professional finite element analysis software conventor ware,piezoelectric drive of the parameters for analysis and optimization of the structure.

Key concepts: Piezoelectricity, Microelectromechanical systems, Piezoelectric accelerometer, Displacement (psychology), Piezoelectric coefficient, Finite element method, PMUT, Piezoelectric sensor

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