Optimal Design of the Parameters Piezoelectric Driver
Xu Wei
Abstract
Xu Wei
Abstract
According to the theoretical design of piezoelectric effect piezoelectric drive. Drive beam width, length and the piezoelectric material and non-piezoelectric material thickness ratio of the output of the drive have a great impact on displacement. The use of MEMS professional finite element analysis software conventor ware,piezoelectric drive of the parameters for analysis and optimization of the structure.
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According to the theoretical design of piezoelectric effect piezoelectric drive. Drive beam width, length and the piezoelectric material and non-piezoelectric material thickness ratio of the output of the drive have a great impact on displacement. The use of MEMS professional finite element analysis software conventor ware,piezoelectric drive of the parameters for analysis and optimization of the structure.
Key concepts: Piezoelectricity, Microelectromechanical systems, Piezoelectric accelerometer, Displacement (psychology), Piezoelectric coefficient, Finite element method, PMUT, Piezoelectric sensor