Luo Hongyang
Abstract
The reason of using FSM in the ion implanter control software modeling is reported,the construction of control software and the hierarchy of FSM and the method of compiling FSM to C++ programs are reported also,and the advantage of the ion implanter control software designed by using FSM is introduced.
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The reason of using FSM in the ion implanter control software modeling is reported,the construction of control software and the hierarchy of FSM and the method of compiling FSM to C++ programs are reported also,and the advantage of the ion implanter control software designed by using FSM is introduced.
Key concepts: Ion implantation, Computer science, Software, Hierarchy, Programming language, Ion, Chemistry, Market economy