Cao Yuecong
Abstract
The problems needed to be solved in domestic production of trichlorosilane are analyzed,which includes the ways to solve by-product silicon tetrachloride,the recovery and treatment of tail gas,and refined trichlorosilane containing boron and phosphorous.The market prospects of trichlorosilane are discussed.
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The problems needed to be solved in domestic production of trichlorosilane are analyzed,which includes the ways to solve by-product silicon tetrachloride,the recovery and treatment of tail gas,and refined trichlorosilane containing boron and phosphorous.The market prospects of trichlorosilane are discussed.
Key concepts: Trichlorosilane, Silicon tetrachloride, Production (economics), Product (mathematics), Chemistry, Silicon, Economics, Mathematics