A Large-Scale Aspheric Surface Ultra-Precision Hybrid Machine Tool

A large-scale aspheric surface ultra-precision hybrid machine tool is developed, which has many functions such as grinding,milling and turning, etc. The machine tool is equipped with high-precision FANUC system. The particular unloading system designed for X cross guideway and accurate balance weight system designed for Z vertical guideway, of which the rotational speed of spindle is 150 r/min and the maximum dimension that can be processed is (?)1 200 mm. High-precision inductance amesdial and autocollimator are used to inspect the machine tool. The results show that the CNC position and control resolution is 0.05 μm,the turning accuracy of spindle is 26 nm. Finally, ultra-precision processing experiments are carried out on the machine tool, and some workpieces with the surface roughness of less than 15 nm are obtained, which shows that the ultra-precision processing of large-scale aspheric surface is achieved.