Analysis of Rectangular Piezoelectric Vibrator Based Linear Ultrasonic Motor

Finite element model of the motor was established.A serial of analysis including size adjustment,modal,harmonic responses,transient were made using Ansys software.Vibrating mode of the piezoelectric resonator was obtained with simulation,the parameters of the corresponding dynamic branch equivalent circuit and the frequency of the vibration with longitudinal and bending mode was calculated.The elliptical trace of the driving foot of the piezoelectric resonator was tested with simulation.Result of the simulation has value for the prototype making and the experiment of the motor.