COMPLIANCES CALCULATION AND BEHAVIOR ANALYSIS OF THE HALF RIGHT CIRCULAR-ELLIPTICAL HYBRID FLEXURE HINGE

The flexure hinges are increasingly used in the micro-electro-mechanical systems (MEMS). A novel flexure hinge was introduced. Based on the Castigliano’s second theorem, the compliance formulations of the novel flexure hinge were formulated. The compliance calculations and the finite element simulation are performed simultaneously for several examples; similar results are obtained indicating the validity of the compliance formulations. By means of the compliance formulations, the effects of the geometric parameters on the performance of the flexure hinge were investigated. Compared with symmetric right circular-elliptical hybrid flexure hinge, the half right circular-elliptical hybrid flexure hinge has better compliance and sensitivity to the load, and it may be a new idea for flexure hinges design.