ScholarLens Back to search
2011•Yuanzihe wuli pinglunRequires access

Ion Sources for Focus Ion Beam System

Zhao Huan-Yu

Open publisher page 0 citations

Abstract

There are two kinds of ion sources,Liquid-Metal Ion Source and Gas Field Ion Source,used to provide ion beams for the Focus Ion Beam system.The working mechanism of the two kinds of sources is presented and their advantages and disadvantages are summarized.With the rapid development in the nano technology,the requirements are hardly met with these two kinds of ion sources.Therefore,a new kind of ion source,electron beam ion source,is developed for the Focus Ion Beam system.The basic principle of the electron beam ion source is introduced and the design parameters,the result of the simulation(20 kV Ar+,extracted emittance is 5.8×10-5π·mm·mrad,raduis of the ion beam about 1 μm.) and the primary experimental results are presented.

About this research paper

What this paper is about

There are two kinds of ion sources,Liquid-Metal Ion Source and Gas Field Ion Source,used to provide ion beams for the Focus Ion Beam system.The working mechanism of the two kinds of sources is presented and their advantages and disadvantages are summarized.With the rapid development in the nano technology,the requirements are hardly met with these two kinds of ion sources.Therefore,a new kind of ion source,electron beam ion source,is developed for the Focus Ion Beam system.The basic principle of the electron beam ion source is introduced and the design parameters,the result of the simulation(20 kV Ar+,extracted emittance is 5.8×10-5π·mm·mrad,raduis of the ion beam about 1 μm.) and the primary experimental results are presented.

Why it matters

A significance statement is not available in the OpenAlex record.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

There are two kinds of ion sources,Liquid-Metal Ion Source and Gas Field Ion Source,used to provide ion beams for the Focus Ion Beam system.The working mechanism of the two kinds of sources is presented and their advantages and disadvantages are summarized.With the rapid development in the nano technology,the requirements are hardly met with these two kinds of ion sources.Therefore,a new kind of ion source,electron beam ion source,is developed for the Focus Ion Beam system.The basic principle of the electron beam ion source is introduced and the design parameters,the result of the simulation(20 kV Ar+,extracted emittance is 5.8×10-5π·mm·mrad,raduis of the ion beam about 1 μm.) and the primary experimental results are presented.

Key concepts: Ion source, Ion beam, Ion gun, Ion, Ion beam deposition, Beam (structure), Focused ion beam, Materials science

Related papers

Related paper 1Related paper 2Related paper 3
Back to paper searchBrowse research topicsOriginal source
Ion Sources for Focus Ion Beam System — Research Paper | ScholarLens