Research of Compensation Based on Force Ripple of Linear Motor for Precision Stage

In order to keep the force ripple of the linear-motor in control, to improve the tracking accuracy of a precision stage, a method based on the analytic following error is proposed. The weight of the following error introduced by the thrust fluctuation is extracted, and then it is used to build a feed forward compensator for the force ripple. It is the motion control architecture based on the PD plus force ripple feed forward compensator being built. In the check experiments, compared to the PD control without compensation of the force ripple, the tracking accuracy is improved 1μm at the uniform speed of 50mm/s, and 4μm at the uniform speed of 120mm/s. The results show that the force ripple of the linear-motor can be controlled efficiently by the proposed method.