Research Progress in Crystalline Silicon Surface Passivation

With the development of crystalline silicon solar cell technology and the reduction of solar cell thickness,the technology of cell surface passivation becomes more important to improve solar cell conversion efficiency.Surface passivation membrane as well as the role played by the membrane crystalline silicon solar cells was introduced.Meanwhile,several kinds of passivation methods were analyzed,including PECVD,hydrogenated a-Si,thermally grown and atomic layer deposition.Advantages and disadvantages of these passivation methods were discussed.Existing problems in the process of cell surface passivation were presented,and the corresponding measures and development trend were put forward.Surface passivation is one of the effective methods to increase the conversion efficiency of the crystalline silicon solar cells,thus still the global research hot spot on the way forward.