Reforming a vacuum sputtering line by ultralow-temperature freezing process

Due to the high atmospheric humidity in sumer and autumn and the water vapor accompanied by workpieces to be coated and their holders,the time required for high vacuum in vacuum chamber is long in the continuous vacuum sputtering process.Thus,the whole production process becomes slow with the reduced utilization rate of productive capacity and increased energy consumption.For this reason,the original vacuum sputtering line was reformed via the ultralow-temperature freezing process with no change of the original layout in the line.As a result,the water vapor in vacuum chamber can be captured and collected quickly so as to acquire the high vacuum required in vacuum chamber,thus attaining the goal for reform.