2006•Microfabrication TechnologyRequires access
Holographic-melting Photoresist Technology of Fabrication of Micro-cylindrical Lens Arrays
Zhibin Ren
Open publisher page 0 citations
Abstract
A new fabricating method of micro-cylindrical lens arrays by adopting holographic exposure-melting photoresist technology is studied to improve the fabrication technology of micro-cylindrical lens arrays and eliminate dependence of photo-masks during photolithography.The photoresist is exposed by holographic technology and then melted to make a fine micro-cylindrical lens array on the K9 glass substrate.The results show that a fine sinusoidal array structure is formed on the photoresist surface by holographic exposure and it is changed into a micro-cylindrical lens array by melting of the photoresist.The result provides a new technology of fabrication of micro-cylindrical lens arrays and it is significant to further improve of the fabrication technology of micro-cylindrical lens arrays.