2002•Microfabrication TechnologyRequires access
Study on Selective Formation of Porous Silicon as a Sacrificial Layer in Microstructure
Litian Liu
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Abstract
The porous silicon as a sacrificial layer could be fabricated in locally defined areas on the Si substrate,using the selective formation of porous silicon.Presented a technique of fabricating the microstructure first and then performing anode oxidation to form a sacrificial layer of porous silicon.The well freestanding microstructure has been made by this technique.The fabrication conditions and selectivity of formation of the porous silicon and masking layer are studied in detail.