2007•Yunnan Daxue xuebao. Shehui kexue banRequires access

Study on the preparation of ITO ceramic target with high density

Huarui Xu

Abstract

The indium tin oxide(ITO) ceramic target with high relative density was prepared by cold iso-static pressing and sinter at air atmosphere process,using the mono-dispersed ITO powders with two different particle size(70±8)nm and(40±6)nm which synthesized by resin-hydrothermal as raw materials.The factors among the particle size-distribution,pressure and sintering temperature etc which affected the density of ITO ceramic targethave been investigated.The ITO ceramic target could have get a relative density about 99.28% by means of which are mixed powder with 7∶3 weight ratio and molded under 250MPa of CIP pressure and then sintered at the temperature of 1 300 ℃ for 1.5 h and 1 400 ℃ for 1 h.

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Key concepts: Ceramic, Materials science, Relative density, Sintering, Raw material, Particle size, Indium tin oxide, Pressing