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Finite Element Analysis of the Piezoelectric Bimorph Harmonic Response

QU Shao-peng

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Abstract

Piezoelectric bimorph for harmonic response simulation analysis is conducted by ANSYS software, and the piezoelectric bimorph resonant frequency and resonant amplitude are obtained as 36 000 Hz and 0.512 × 10-5 m.By the orthogonal experiment,the main factors which affect the resonant frequency and amplitude of the piezoelectric bimorph are obtained,and the size of the piezoelectric bimorph optimal combination is reached for the design and application of the piezoelectric bimorph.The size of the piezoelectric film is 20 × 6 × 0.4 mm 3 and the size of the substrate is 20 × 6 × 4 mm 3.

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What this paper is about

Piezoelectric bimorph for harmonic response simulation analysis is conducted by ANSYS software, and the piezoelectric bimorph resonant frequency and resonant amplitude are obtained as 36 000 Hz and 0.512 × 10-5 m.By the orthogonal experiment,the main factors which affect the resonant frequency and amplitude of the piezoelectric bimorph are obtained,and the size of the piezoelectric bimorph optimal combination is reached for the design and application of the piezoelectric bimorph.The size of the piezoelectric film is 20 × 6 × 0.4 mm 3 and the size of the substrate is 20 × 6 × 4 mm 3.

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Available abstract

Piezoelectric bimorph for harmonic response simulation analysis is conducted by ANSYS software, and the piezoelectric bimorph resonant frequency and resonant amplitude are obtained as 36 000 Hz and 0.512 × 10-5 m.By the orthogonal experiment,the main factors which affect the resonant frequency and amplitude of the piezoelectric bimorph are obtained,and the size of the piezoelectric bimorph optimal combination is reached for the design and application of the piezoelectric bimorph.The size of the piezoelectric film is 20 × 6 × 0.4 mm 3 and the size of the substrate is 20 × 6 × 4 mm 3.

Key concepts: Bimorph, Piezoelectricity, Harmonic, Piezoelectric coefficient, Acoustics, Materials science, Amplitude, PMUT

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