Application of Zemax software in alignment of three-mirror off-axis aspherical optical system

With the aid of Zemax software, a three-mirror, unobscured, high-resolution optical system with large aperture, long focal length was successfully aligned by first collecting interferograms from several fields of all image plane, and obtaining the wavefront error, namely, obtained wavefront Zernike polynomials; then using the self-made program package to calculate the optical system misalignment. Finally, comparing Zernike polynomial coefficients of ideal optical system with Zernike polynomial coefficients of aligned optical system, and drawing a conclusion about the alignment correction values. It is simple and valid. After alignment, the optical system produced a measured wavefront error across the all image plane of 0.108 waves RMS at λ=632.8 nm.