Stiffness and Micro-Error Sources Analysis of Aerostatic Bearings

In order to solve the identification of the micro-errors and its impact on structural design of precise engineering,the aerostatic bearings,the key parts of the aerostatic system,were analyzed.The aerostatic bearing stiffness,the air-film stiffness and the micro-error aroused by the random air vibration of four conventional bearings,with different cross sections like square,triangular,trapezoid and п-shape,were analyzed.The analysis lead to a conclusion that the air-bearing with the п-shape cross section was of the highest machining and measuring accuracy,especially for the horizontal-type and low load use.The research is of reference value for the relevant designing of engineers.