2004Journal of Transducer TechnologyRequires access

Fabrication technology of polydimethylsiloxane microfluidic chip

Wang Li

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Abstract

Microfluidic chips based on MEMS technology exhibit great potentials in analytical chemistry and biomedical fields.As a substrate material for building microfluidic chips,polydimethylsiloxane(PDMS)shows a lot of advantages,including good insulating properties,high thermal stability,excellent optical characteristic and simple fabrication process.PDMS electrophoresis microchip is fabricated using casting method.The fabrication process,sealing methods and structure characteristic of PDMS microfluidic chips are discussed,and the corresponding solutions are also presented.

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Microfluidic chips based on MEMS technology exhibit great potentials in analytical chemistry and biomedical fields.As a substrate material for building microfluidic chips,polydimethylsiloxane(PDMS)shows a lot of advantages,including good insulating properties,high thermal stability,excellent optical characteristic and simple fabrication process.PDMS electrophoresis microchip is fabricated using casting method.The fabrication process,sealing methods and structure characteristic of PDMS microfluidic chips are discussed,and the corresponding solutions are also presented.

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Available abstract

Microfluidic chips based on MEMS technology exhibit great potentials in analytical chemistry and biomedical fields.As a substrate material for building microfluidic chips,polydimethylsiloxane(PDMS)shows a lot of advantages,including good insulating properties,high thermal stability,excellent optical characteristic and simple fabrication process.PDMS electrophoresis microchip is fabricated using casting method.The fabrication process,sealing methods and structure characteristic of PDMS microfluidic chips are discussed,and the corresponding solutions are also presented.

Key concepts: Polydimethylsiloxane, Microfluidics, Fabrication, Materials science, Microelectromechanical systems, Nanotechnology, Substrate (aquarium), Casting

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