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Effects of vacuum heat treatment on high temperature oxidation behavior of the surfaces of sputtered NiCrAlY films

Xingzhao Liu

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Abstract

NiCrAlY films were deposited on the nickel-based superalloy DZ4 by DC magnetron sputtering.The NiCrAlY films were annealed in vacuum and then oxidized at high temperature to form a layer of dense Al2O3 on the surface of the film.The effects of vacuum heat treatment on high temperature oxidation behavior of the surfaces of sputtered NiCrAlY films were studied.The results show that a single stable α-Al2O3 phase is formed on the surface of the NiCrAlY film which is oxidized at high temperature in oxygen atmosphere after vacuum heat treatment,and the population fractions of Al and O on the surface of this film are about 32% and 50%,respectively.θ-Al2O3 and α-Al2O3 phases are formed on the surface of the NiCrAlY film without vacuum heat treatment after high temperature oxidation,and with uneven distribution.

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What this paper is about

NiCrAlY films were deposited on the nickel-based superalloy DZ4 by DC magnetron sputtering.The NiCrAlY films were annealed in vacuum and then oxidized at high temperature to form a layer of dense Al2O3 on the surface of the film.The effects of vacuum heat treatment on high temperature oxidation behavior of the surfaces of sputtered NiCrAlY films were studied.The results show that a single stable α-Al2O3 phase is formed on the surface of the NiCrAlY film which is oxidized at high temperature in oxygen atmosphere after vacuum heat treatment,and the population fractions of Al and O on the surface of this film are about 32% and 50%,respectively.θ-Al2O3 and α-Al2O3 phases are formed on the surface of the NiCrAlY film without vacuum heat treatment after high temperature oxidation,and with uneven distribution.

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Available abstract

NiCrAlY films were deposited on the nickel-based superalloy DZ4 by DC magnetron sputtering.The NiCrAlY films were annealed in vacuum and then oxidized at high temperature to form a layer of dense Al2O3 on the surface of the film.The effects of vacuum heat treatment on high temperature oxidation behavior of the surfaces of sputtered NiCrAlY films were studied.The results show that a single stable α-Al2O3 phase is formed on the surface of the NiCrAlY film which is oxidized at high temperature in oxygen atmosphere after vacuum heat treatment,and the population fractions of Al and O on the surface of this film are about 32% and 50%,respectively.θ-Al2O3 and α-Al2O3 phases are formed on the surface of the NiCrAlY film without vacuum heat treatment after high temperature oxidation,and with uneven distribution.

Key concepts: Materials science, Superalloy, Ultra-high vacuum, Metallurgy, Sputtering, Sputter deposition, Layer (electronics), Composite material

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