Modal Analysis and Experiment on Large-aperture Optics Inspection Stages

Modal simulation is performed by building finite element model on large-aperture optics inspection stages by using ANSYS, and first six natural frequencies and mode shapes are acquired. Related modal experiments are performed to verify its result, proving the validity of simulation analysis. In order to improve stiffness of stages, flotation support stiffness and flexible hinge structure parameters are chosen as variables, to study their effects on the natural frequency of the stages. The result shows that flotation support stiffness has effect less than 1.5% on stages stiffness,while thickness of flexible hinge has significant effect more than 20%, which can be chosen to optimize dynamic characteristic of the stages.