Study on the Sensitivity of the Piezoresistive Accelerometer as a Function of Temperature

The influence of temperature on the sensitivity of the piezoresistive micro-accelerometer is quantitatively researched. As the theoretical research shows that the relative error of the sensitivity of the piezoresistive micro-accelerometer increases with the increase of temperature deviations, which is -4.943% at the temperature of 20℃,and 4.982% at -20℃. Temperature characteristic testing system of the piezoresistive micro-accelerometer is designed, and the testing results show that the relative error of the sensitivity is -4.303% at the temperature of 20℃, and 4.251% at -20℃. The theoretical results accord well with the testing results.