Ma Jia
Abstract
With the wide application of micro sensors,micromachining technology is more and more used in manufacture for micro sensors.The key processes of bulk micromachining and surface micromachining are introduced,and two micro sensors using the above technologies are presented respectively.
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With the wide application of micro sensors,micromachining technology is more and more used in manufacture for micro sensors.The key processes of bulk micromachining and surface micromachining are introduced,and two micro sensors using the above technologies are presented respectively.
Key concepts: Surface micromachining, Bulk micromachining, Materials science, Microelectromechanical systems, Nanotechnology, Fabrication, Pathology, Medicine