Theory and Experimental Research on Dynamics Modeling of Active Vibration Isolation System for Ultra-Precision motion Platform

Control system of vibration isolation is an uncertain and nonlinear system Ultra-precision platform.The vibration reduction system of the vibration isolation platform is designed.A device with air springs was designed in the system.Switch of passive and active isolation system carried out by the power supply,and analyzed and built a system dynamics model.The testing result indicates that the active vibration control system of the vibration isolation platform can reduce the vibration.It provides a nice vibration isolation environment and a new way for dynamics studies of active vibration isolation system,or relative systems.