A system for virtual manufacturing of integrated circuits

Based on the design of a system, VirMIC, for virtual manufacturing of integrated circuits, this paper discusses two key supporting technologies, i.e., the development of an open framework for the integration of various heterogeneous simulation software and the modeling technology to construct the model of manufacturing system. The framework must support a task oriented environment for the user to design the process procedure in a controllable mode and analyze the manufacturability. Through the modeling technology, the model of the manufacturing system is obtained, which facilitates optimal fabrication scheduling. Furthermore a control procedure for the manufacturing system is given on the basis of the scheduling result.